Semiconductor wafer defect pattern recognition and classification is a crucial area of research that underpins yield enhancement and quality assurance in microelectronics manufacturing. The discipline ...

For quality control purposes, wafers, such as semiconductor or flat-panel display (FPD) chips, need to be examined under a microscope to verify that they meet specifications related to both circuit ...

3D optical profiling provides many benefits over other measurement methods used for non-contact inspection of semiconductor packaging front-end process research and control. These benefits range from ...

Building semiconductors is an incredibly exacting process, with critical dimensions posing significant equipment challenges – and with the possibility that small process excursions can cause the yield ...